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67 results found.
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Differential interferometer
Renishaw's RLD10 differential interferometer detector head measures stage versus column or workpiece versus tool for a true differential measurement. [15 kB] RLE20 interferometer enhances performance of Vistec Lithography’s latest e-beam tool
Vistec Lithography’s (previously Leica Microsystems) VB300 e-beam lithography tool is a development of the highly successful VB6 series introduced in 1993. In designing the new tool, Vistec identified that a reduction of noise-induced positional errors would significantly improve tool performance. Through a combination of improved mechanical rigidity and integration of the Renishaw RLE20 differential interferometer based encoder system, these errors are now expected to be 3 nm. [28 kB] Laser encoders
Renishaw's interferometric encoders provide the ultimate accuracy in linear position feedback, including linear (retroreflector) systems, laser encoders, X-Y (plane mirror) systems and differential interferometers. [11 kB] RLE system overview
Introduction and overview of Renishaw's RLE laser interferometer-based position feedback system, and the HS10 long-range laser scale. [15 kB] Plane mirrors and mirror mounts
Upon request Renishaw can supply plane mirror target optics with a cross section of 25 mm x 25 mm with optical apertures of up to 300 mm. Mirror mounts are available for mirrors with cross section of 25 mm x 25 mm and overall lengths of 350 mm. [12 kB] RPI20 parallel interface
Renishaw's RPI20 parallel interface unit takes analogue output signals and interpolates by 4096 to provide an output in parallel word format with up to 36-bits of position data being available [13 kB]
RLD10 DI news release
New, differential measurement configuration provides a fibre optic launched interferometer solution for precision motion control in vacuum or other controlled environments. [31 kB] RLE20 laser system news release
RLE interferometer system specification extended to include differential measurement, part per billion laser frequency stability and picometre resolution. [72 kB] RLE system performance data sheet
Data sheet describes the RLE system which provides the positioning performance expected from an interferometer, with ease of installation and use. [1.65 MB] RLU10 laser unit data sheet
The RLE system comprises an RLU laser unit and one or two RLD detector heads. This data sheet describes the RLU10 laser unit. [156 kB] RLU20 laser unit data sheet
The RLE system cormprises an RLU laser unit and one or two RLD detector heads. This data sheet describes the RLU20, a laser unit with enhanced frequency stability. [315 kB]
DI headRLD10-X3-DI differential interferometer mounted on vacuum chamber wall - [180 x 208 pixels] [7 kB]
DI headRLD10-X3-DI differential interferometer mounted on vacuum chamber wall - [540 x 625 pixels] [21 kB]
DI headRLD10-X3-DI differential interferometer mounted on vacuum chamber wall - [1200 x 1390 pixels] [642 kB]
RLE20Renishaw's RLE20 differential interferometer measures the position between two mirrors inside the Vistec Lithography's VB300 vacuum chamber. - [120 x 80 pixels] [3 kB]
- [180 x 120 pixels] [6 kB]
- [540 x 360 pixels] [28 kB]
- [2400 x 1601 pixels] [1.91 MB]
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