| Differential interferometer
Renishaw's RLD10 differential interferometer detector head measures stage versus column or workpiece versus tool for a true differential measurement. [17 kB] | |
| RLE20 interferometer enhances performance of Vistec Lithography’s latest e-beam tool
Vistec Lithography’s (previously Leica Microsystems) VB300 e-beam lithography tool is a development of the highly successful VB6 series introduced in 1993. In designing the new tool, Vistec identified that a reduction of noise-induced positional errors would significantly improve tool performance. Through a combination of improved mechanical rigidity and integration of the Renishaw RLE20 differential interferometer based encoder system, these errors are now expected to be 3 nm. [38 kB] | |
| Linear system configuration
Part numbers of common linear Renishaw RLU / RLD system configurations [17 kB] | |
| X-Y system configuration
Part numbers of common X-Y Renishaw RLU / RLD system configurations [18 kB] | |
| Laser encoders
Renishaw's interferometric encoders provide the ultimate accuracy in linear position feedback, including linear (retroreflector) systems, laser encoders, X-Y (plane mirror) systems and differential interferometers. [16 kB] | |
| RLE system overview
Introduction and overview of Renishaw's RLE laser interferometer-based position feedback system, and the HS10 long-range laser scale. [19 kB] | |
| Plane mirrors and mirror mounts
Upon request Renishaw can supply plane mirror target optics with a cross section of 25 mm x 25 mm with optical apertures of up to 300 mm. Mirror mounts are available for mirrors with cross section of 25 mm x 25 mm and overall lengths of 350 mm. [19 kB] | |
| X-Y (plane mirror) system
Renishaw's RLE laser interferometer-based X-Y encoder system [18 kB] | |
| Welcome to Renishaw
In metrology, motion control, machine calibration, dental CAD/CAM, spectroscopy and neurosurgery, Renishaw innovations enhance precision, efficiency and quality. Key products include CMM touch-trigger probes, scanning probes, CMM retrofits, machine tool touch probes and laser probes, optical linear encoders, optical angle encoders, magnetic linear encoders, magnetic rotary encoders, magnetic chip encoders, raman spectroscopy, laser calibration, dental scanners and neurosurgical robots. [53 kB] | |
| Linear (retroreflector) system
Renishaw's RLE laser interferometer-based linear encoder system [18 kB] | |