| Differential interferometer
Renishaw's RLD10 differential interferometer detector head measures stage versus column or workpiece versus tool for a true differential measurement. [14 kB] | |
| RLE20 interferometer enhances performance of Vistec Lithography’s latest e-beam tool
Vistec Lithography’s (previously Leica Microsystems) VB300 e-beam lithography tool is a development of the highly successful VB6 series introduced in 1993. In designing the new tool, Vistec identified that a reduction of noise-induced positional errors would significantly improve tool performance. Through a combination of improved mechanical rigidity and integration of the Renishaw RLE20 differential interferometer based encoder system, these errors are now expected to be 3 nm. [30 kB] | |
| Laser encoders
Interferometer encoders provide the ultimate accuracy in linear position feedback. [12 kB] | |
| X-Y system configuration
Part numbers of common X-Y Renishaw RLU / RLD system configurations [15 kB] | |
| Linear system configuration
Part numbers of common linear Renishaw RLU / RLD system configurations [15 kB] | |
| Laser encoders overview
Introduction and overview of Renishaw's RLE laser interferometer-based position feedback system, and the HS10 long-range laser scale. [17 kB] | |
| Plane mirrors and mirror mounts
Upon request Renishaw can supply plane mirror target optics with a cross section of 25 mm x 25 mm with optical apertures of up to 300 mm. Mirror mounts are available for mirrors with cross section of 25 mm x 25 mm and overall lengths of 350 mm. [16 kB] | |
| X-Y (plane mirror) system
Renishaw's RLE laser interferometer-based X-Y encoder system [15 kB] | |
| Linear (retroreflector) system
Renishaw's RLE laser interferometer-based linear encoder system [15 kB] | |
| Welcome to Renishaw
In metrology, motion control, machine calibration, dental CAD/CAM, spectroscopy and neurosurgery, Renishaw innovations enhance precision, efficiency and quality. [42 kB] | |