Poster: REF interfaces and REE interpolators (English and Japanese) (pdf)

File size: 2.13 MB Language: Multiple Languages

Poster: REF interfaces and REE interpolators (English and Japanese)

Fine resolution to 5 nm
Available with decimal and binary interpolation
High speed
Up to 2.8 m/s at 0.1 μm and 140 mm/s at 5 nm
Automatic offset, balance and gain control
Gives low cyclic error (SDE) <50 nm, active at all speeds

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