3D 拉曼化學影像顯示由鑽石維氏壓頭在矽晶圓上製造的壓痕。 (mp4)

File size: 77.35 MB Language: Language Independent Dimensions: 1920 x 1080 px Part number: MO029(EN)-01-B

Renishaw 的 LiveTrack™ 聚焦追蹤技術可在不平、彎曲或粗糙的表面上輕鬆研究樣本。內凹矽晶圓的 3D 拉曼影像顯示壓痕周圍的應力 (抗壓區域白色/黃色、拉伸區域黑色/暗紅色)。壓痕內的藍綠色區域為經極高塑性變形的矽,且含高度非晶質的結構。

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