用户指南: XM-60和XM-600多光束激光干涉仪 (pdf)

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用户指南: XM-60和XM-600多光束激光干涉仪

XM系统只需一次设定即可沿线性轴同时测量6个自由度的误差。它具有强大的诊断工具,通过一次采集就可以测量轴的所有几何误差。

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