规格手册: TONiC™ UHV光栅系统 (pdf)

File size: 1.36 MB Language: 中文(简体) Part number: L-9517-9431

规格手册: TONiC™ UHV光栅系统

TONiC UHV光栅具有成熟的TONiC直线光栅和圆光栅系统的所有优点,而且其读数头的设计和制造使用了超高真空兼容材料和工艺。

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