新闻稿: 新闻文章 - RSLM - 适用于平板应用的新型高精度光栅 (doc)

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新闻稿:  新闻文章 - RSLM - 适用于平板应用的新型高精度光栅

雷尼绍公司的SiGNUM™ RSLM光栅系统具有±30 nm的周期误差,配有滤波系统,分辨率为5 nm,安装简单,它还使20 μm栅距光栅的性能具备了小栅距光栅系统的所有优点。

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